SPECIFICATIONS：PhysicalExcel5120 Excel5220MeasuringVolume900*1200*150mm(35.4"*47.2"*5.9")ExternalDimensionsL2285*1525*H1650 (90"*60"*65")Weight 2050kg(4500lb)Capacity 100kg(220lb)Stage SteelBaseMdterial GraniteWaysUniqueX YMonorail,MonorailLinearZMotionCortrolServo:CNC,Moues,andPendantControlPowerRequirements93-264VAC,47-63Hz,10Ampmax.PerformanceExcel5120Excel5220XYAccuracy U=5.0+L/300μmZAccuracy U=3.0+L/150μmXYRepeat 5.0μm(0.000200")ZRepeatability 3.0μm(0.000120")X,YAcceleration 1000mm/s2(40"/s2)ZAcceleration 500mm/s2(20"/s2)X,YSpeed 150mm/s2(20"/s2)ScaleResolution 0.5μm(0.000020")FeaturesExcel5120Excel5220VideoHi-ResB WHi-ResColorllluminationSourceRedLEDsWhiteLEDsLighting Surface,Profile,andAxialOptics/Magnification12:1ProgrammableZoom/～17x-400xSoftwareInSpecforWindowsMetrolongySoftwareComputer1.2GHz,256MBRAM,Windows2000,CD-RW,EthernetCardEnvironmental20℃(680F)±20,30-80%HumiditiyWarranty1YearPartsandService