SupplyVoltage: 4.75V 5.25VOperatingTemperature: -40 C 125 COutputsignal: ratiometrical,linear,analogueSCA610:forX/YaxismeasurementSCA620:forZaxismeasurementSingle+5VsupplyLowcurrentconsumption(2mAtyp.)RatiometricanalogoutputinrelationtosupplyvoltageVDD=4.75...5.25VEnhancedfailuredetectionfeaturesDigitallyactivated,trueself-testbyproofmassdeflectionusingelectrostaticforceMemoryparitycheckduringpoweronandselftestBuiltinconnectionfailuredetectionWideloaddrivecapability(?20kOhm,?20nF)