SCA610:forX/YaxismeasurementSCA620:forZaxismeasurementSingle+5VsupplyLowcurrentconsumption(2mAtyp.)RatiometricanalogoutputinrelationtosupplyvoltageVDD=4.75...5.25VEnhancedfailuredetectionfeaturesDigitallyactivated,trueself-testbyproofmassdeflectionusingelectrostaticforceMemoryparitycheckduringpoweronandselftestBuiltinconnectionfailuredetectionWideloaddrivecapability(?20kOhm,?20nF)