?1794-PS13
1794-PS13
1794-PS13
PLC程序的調(diào)試可以分為模擬調(diào)試和現(xiàn)場調(diào)試兩個(gè)調(diào)試過程，在此之前首先對PLC外部接線作仔細(xì)檢查，這一個(gè)環(huán)節(jié)很重要。外部接線一定要準(zhǔn)確無誤。也可以用事先編寫好的試驗(yàn)程序?qū)ν獠拷泳€做掃描通電檢查來查找接線故障。不過，為了安全考慮，最好將主電路斷開。當(dāng)確認(rèn)接線無誤后再連接主電路，將模擬調(diào)試好的程序送入用戶存儲器進(jìn)行調(diào)試，直到各部分的功能都正常，并能協(xié)調(diào)一致地完成整體的控制功能為止。

NOVELLUS 27-262408-00 / I/O CONTROLLER / Software version : IOC V4.20

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NOVELLUS 27-10157-00 / I/O CONTROLLER / Software version : IOC V4.21 / IOC V4.22

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CENTURA / ENDURA 0040-32052, DPS POLY CATH BELLOWS

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AMAT 0190-36497, CHAMBER PNUEMATICS, SOLENOID

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0010-30140 , ASSY,CONNECTOR BOX,HV FILTER,DPS

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AMAT 0190-35390, CHAMBER PNUEMATICS, SOLENOID

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Varian 04-715360-01 C (REV) /System Transfer Computer

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ENI MW-5DM11 RF Impedance Matching Network

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Varian 04-715359-01 A(REV)/Intellig?ent Process computer

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F24069CA, UF3000 Prober, Top plate Docking ring

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AMAT 0021-35163 REV C, Reflector Plate Chamber Bottom

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PARKER SX6-Drive Mircrostep Compumotor Servo Drive, 87-011751-01

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Novellus ASTEX AX7610-5 REV 1L

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VARIAN HIGH VACCUM PPARATUS MFG.INC 422-0319 Slit Gate valve

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Novellus ASTEX AX7610, ASTEX CHEMICAL DOWNSTREAM PLASMA SOURCE

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TEL O-RING VITON, AS568-473 BLK, ES027-003420-1

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Kalrez UltraPure AS568A, 8002UP, O-RING